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Claude Pellet
Claude Pellet
Email confirmado em ims-bordeaux.fr
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Fast response humidity sensors for a medical microsystem
A Tetelin, C Pellet, C Laville, G N’Kaoua
Sensors and Actuators B: Chemical 91 (1-3), 211-218, 2003
1122003
Interdigitated humidity sensors for a portable clinical microsystem
C Laville, C Pellet, G N'Kaoua
1st Annual International IEEE-EMBS Special Topic Conference on …, 2000
872000
A straightforward determination of fluid viscosity and density using microcantilevers: From experimental data to analytical expressions
M Youssry, N Belmiloud, B Caillard, C Ayela, C Pellet, I Dufour
Sensors and Actuators A: Physical 172 (1), 40-46, 2011
792011
Epitaxial growth of yttria‐stabilized zirconia films on silicon by ultrahigh vacuum ion beam sputter deposition
P Legagneux, G Garry, D Dieumegard, C Schwebel, C Pellet, G Gautherin, ...
Applied physics letters 53 (16), 1506-1508, 1988
771988
The microcantilever: A versatile tool for measuring the rheological properties of complex fluids
I Dufour, A Maali, Y Amarouchene, C Ayela, B Caillard, A Darwiche, ...
Journal of Sensors 2012, 2012
752012
Comparison of three humidity sensors for a pulmonary function diagnosis microsystem
C Laville, C Pellet
IEEE Sensors Journal 2 (2), 96-101, 2002
742002
Dynamic behavior of a chemical sensor for humidity level measurement in human breath
A Tetelin, V Pouget, JL Lachaud, C Pellet
IEEE Transactions on Instrumentation and Measurement 53 (4), 1262-1267, 2004
592004
Humidity sensors for a pulmonary function diagnostic microsystem
C Laville, JY Deletage, C Pellet
Sensors and Actuators B: Chemical 76 (1-3), 304-309, 2001
582001
Growth of silicon homoepitaxial thin films by ultrahigh vacuum ion beam sputter deposition
C Schwebel, F Meyer, G Gautherin, C Pellet
Journal of Vacuum Science & Technology B: Microelectronics Processing and …, 1986
571986
Raman scattering and stress measurements in Si1−xGex layers epitaxially grown on Si(100) by ion‐beam sputter deposition
F Meyer, M Zafrany, M Eizenberg, R Beserman, C Schwebel, C Pellet
Journal of applied physics 70 (8), 4268-4277, 1991
521991
Modeling and performance of uncoated microcantilever-based chemical sensors
S Tétin, B Caillard, F Ménil, H Debéda, C Lucat, C Pellet, I Dufour
Sensors and Actuators B: Chemical 143 (2), 555-560, 2010
472010
Physical and electrical properties of yttria-stabilized zirconia epitaxial thin films deposited by ion beam sputtering on silicon
C Pellet, C Schwebel, P Hesto
Thin Solid Films 175, 23-28, 1989
461989
Modeling and optimization of a fast response capacitive humidity sensor
A Tetelin, C Pellet
IEEE Sensors Journal 6 (3), 714-720, 2006
382006
Geometry optimization of uncoated silicon microcantilever-based gas density sensors
MT Boudjiet, J Bertrand, F Mathieu, L Nicu, L Mazenq, T Leichle, ...
Sensors and Actuators B: Chemical 208, 600-607, 2015
372015
Pirani pressure sensor for smart wafer-level packaging
F Mailly, N Dumas, N Pous, L Latorre, O Garel, E Martincic, F Verjus, ...
Sensors and Actuators A: Physical 156 (1), 201-207, 2009
282009
FTIR spectroscopy for the hermeticity assessment of micro-cavities
D Veyrié, D Lellouchi, JL Roux, F Pressecq, A Tetelin, C Pellet
Microelectronics Reliability 45 (9-11), 1764-1769, 2005
282005
New characterization methods for monitoring small resonant frequency variation: Experimental tests in the case of hydrogen detection with uncoated silicon microcantilever-based …
MT Boudjiet, J Bertrand, C Pellet, I Dufour
Sensors and Actuators B: Chemical 199, 269-276, 2014
272014
Epitaxial growth of single-crystal Si1− xGex on Si (100) by ion beam sputter deposition
F Meyer, C Schwebel, C Pellet, G Gautherin, A Buxbaum, M Eizenberg, ...
Thin Solid Films 184 (1-2), 117-123, 1990
271990
Angular distributions of heavy particles emitted from a Si target during an ion beam sputter process
C Schwebel, C Pellet, G Gautherin
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1986
261986
Ion beam sputtering deposition of tungsten: Energy and mass effects of primary ions
F Meyer, D Louchier, V Stambouli, C Pellet, C Schwebel, G Gautherin
Applied surface science 38 (1-4), 286-294, 1989
251989
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