| Etch rates for micromachining processing-Part II KR Williams, K Gupta, M Wasilik Journal of microelectromechanical systems 12 (6), 761-778, 2003 | 1668 | 2003 |
| An introduction to microelectromechanical systems engineering N Maluf, K Williams Artech House, 2004 | 1440 | 2004 |
| Etch rates for micromachining processing KR Williams, RS Muller Journal of Microelectromechanical systems 5 (4), 256-269, 1996 | 1026 | 1996 |
| Novel interconnection technologies for integrated microfluidic systems BL Gray, D Jaeggi, NJ Mourlas, BP Van Drieenhuizen, KR Williams, ... Sensors and Actuators A: Physical 77 (1), 57-65, 1999 | 263 | 1999 |
| Sealed micromachined vacuum and gas filled devices RS Muller, CH Mastrangelo, KR Williams US Patent 5,493,177, 1996 | 184 | 1996 |
| Microvalve with pressure equalization KR Williams, BP Van Drieenhuizen, DP Jaeggi, NI Maluf, EN Fuller, ... US Patent 6,523,560, 2003 | 93 | 2003 |
| Proportional micromechanical device NI Maluf, KR Williams, BP Van Drieenhuizen, EN Fuller, RJ Barron US Patent 6,761,420, 2004 | 73 | 2004 |
| Proportional micromechanical valve NI Maluf, KR Williams, BP Van Drieenhuizen, EN Fuller, RJ Barron US Patent 7,011,378, 2006 | 57 | 2006 |
| Tunable capacitor KR Williams US Patent 6,853,534, 2005 | 50 | 2005 |
| A SILICON MICRO VALVE FOR THE PROPORTIONAL CONTROL OF FLUIDS R KIRT Transducers' 99 Digest of Technical Papers, June 7-10 (1999), Sendai, Japan …, 1999 | 47 | 1999 |
| Thermally actuated microvalve device RJ Barron, KR Williams, EN Fuller, HA Hunnicutt US Patent 6,845,962, 2005 | 45 | 2005 |
| Micromachined parallel-plate variable capacitor with plate suspension KR Williams US Patent 6,549,394, 2003 | 38 | 2003 |
| Novel interconnection technologies for integrated microfluidic systems D Jaeggi, BL Gray, NJ Mourlas, BP Van Drieenhuizen, KR Williams, ... Solid-State Sensor and Actuator Workshop, 112-115, 1998 | 34 | 1998 |
| A high-performance dipole surface drive for large travel and force S Hoen, Q Bai, JA Harley, DA Horsley, F Matta, T Verhoeven, J Williams, ... TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003 | 32 | 2003 |
| Vacuum steered-electron electric-field sensor KR Williams, DPH De Bruyker, SJ Limb, EM Amendt, DA Overland Journal of microelectromechanical systems 23 (1), 157-167, 2013 | 22 | 2013 |
| Surface roughening to reduce adhesion in an integrated mems device KR Williams, K Huang, W Xu, S Jongwoo, M Lim US Patent App. 14/061,152, 2014 | 21 | 2014 |
| Variable capacitor having a rigidity-increasing feature KR Williams, F Matta US Patent 7,006,342, 2006 | 14 | 2006 |
| Micromachined hot-filament vacuum devices KR Williams University of California, Berkeley, 1997 | 12 | 1997 |
| IC-processed hot-filament vacuum microdevices Muller 1992 International Technical Digest on Electron Devices Meeting, 387-390, 1992 | 12 | 1992 |
| Characterization techniques for a MEMS electric-field sensor in vacuum S Ghionea, D Hull, K Williams Journal of Electrostatics 71 (6), 1076-1082, 2013 | 10 | 2013 |
Richard S. Mullerprofessor of eecs university of california berkeleyEmail confirmado em eecs.berkeley.edu
