| 3-D micromachined hemispherical shell resonators with integrated capacitive transducers LD Sorenson, X Gao, F Ayazi 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems …, 2012 | 89 | 2012 |
| One-dimensional linear acoustic bandgap structures for performance enhancement of AlN-on-Silicon micromechanical resonators L Sorenson, JL Fu, F Ayazi 2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011 | 50 | 2011 |
| Bulk and surface thermoelastic dissipation in micro-hemispherical shell resonators L Sorenson, P Shao, F Ayazi Journal of Microelectromechanical Systems 24 (2), 486-502, 2014 | 41 | 2014 |
| Energy dissipation in micromechanical resonators F Ayazi, L Sorenson, R Tabrizian Micro-and Nanotechnology Sensors, Systems, and Applications III 8031, 371-383, 2011 | 37 | 2011 |
| An empirical phase-noise model for MEMS oscillators operating in nonlinear regime M Pardo, L Sorenson, F Ayazi IEEE Transactions on Circuits and Systems I: Regular Papers 59 (5), 979-988, 2012 | 35 | 2012 |
| Effect of thickness anisotropy on degenerate modes in oxide micro-hemispherical shell resonators LD Sorenson, P Shao, F Ayazi 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems …, 2013 | 33 | 2013 |
| Invar-36 micro hemispherical shell resonators N Mehanathan, V Tavassoli, P Shao, L Sorenson, F Ayazi 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems …, 2014 | 32 | 2014 |
| Multi-axis AlN-on-Silicon vibration energy harvester with integrated frequency-upconverting transducers JL Fu, Y Nakano, LD Sorenson, F Ayazi 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems …, 2012 | 29 | 2012 |
| Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein F Ayazi, LD Sorenson US Patent 7,888,843, 2011 | 29 | 2011 |
| Wineglass-on-a-chip P Shao, LD Sorenson, X Gao, F Ayazi Solid-State Sensors, Actuators, and Microsystems Workshop 7, 275-278, 2012 | 28 | 2012 |
| Electrical characterization of ALD-coated silicon dioxide micro-hemispherical shell resonators P Shao, V Tavassoli, CS Liu, L Sorenson, F Ayazi 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems …, 2014 | 26 | 2014 |
| Continuous trajectory calculation for directional drilling H Nguyen, LD Sorenson, DL Walter, AV Kabakian, R Perahia, S Wang, ... US Patent 11,299,981, 2022 | 22 | 2022 |
| A low-power reversible alkali atom source S Kang, RP Mott, KA Gilmore, LD Sorenson, MT Rakher, EA Donley, ... Applied Physics Letters 110 (24), 2017 | 22 | 2017 |
| Compensation, tuning, and trimming of MEMS resonators F Ayazi, R Tabrizian, L Sorenson 2012 IEEE International Frequency Control Symposium Proceedings, 1-7, 2012 | 20 | 2012 |
| Phase noise shaping via forced nonlinearity in piezoelectrically actuated silicon micromechanical oscillators M Pardo, L Sorenson, W Pan, F Ayazi 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011 | 18 | 2011 |
| Effect of structural anisotropy on anchor loss mismatch and predicted case drift in future micro-hemispherical resonator gyros L Sorenson, F Ayazi 2014 IEEE/ION Position, Location and Navigation Symposium-PLANS 2014, 493-498, 2014 | 16 | 2014 |
| Piezoelectric micromechanical energy harvesters F Ayazi, L Sorenson, J Fu US Patent 8,680,752, 2014 | 15 | 2014 |
| Vapor cells with transparent alkali source and/or sink CS Roper, MT Rakher, LD Sorenson US Patent 9,763,314, 2017 | 13 | 2017 |
| FM demodulation system for quartz MEMS magnetometer LD Sorenson, H Nguyen, R Perahia, DT Chang, LXC Huang, JA Erbland US Patent 10,175,307, 2019 | 10 | 2019 |
| Opportunistic sensor fusion algorithm for autonomous guidance while drilling LD Sorenson, S Wang, DL Walter, AV Kabakian, KS Kona, H Nguyen, ... US Patent 10,718,198, 2020 | 9 | 2020 |
Dr. Farrokh AyaziDirector, Center for MEMS and Microsystems Technologies, Georgia Institute of TechnologyVerified email at gatech.edu
