| Cell refractive index for cell biology and disease diagnosis: past, present and future PY Liu, LK Chin, W Ser, HF Chen, CM Hsieh, CH Lee, KB Sung, TC Ayi, ... Lab on a Chip 16 (4), 634-644, 2016 | 392 | 2016 |
| Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro-and nanostructures F Marty, L Rousseau, B Saadany, B Mercier, O Français, Y Mita, ... Microelectronics journal 36 (7), 673-677, 2005 | 354 | 2005 |
| A batch-fabricated and electret-free silicon electrostatic vibration energy harvester P Basset, D Galayko, AM Paracha, F Marty, A Dudka, T Bourouina Journal of Micromechanics and Microengineering 19 (11), 115025, 2009 | 282 | 2009 |
| Switchable magnetic metamaterials using micromachining processes WM Zhu, AQ Liu, XM Zhang, DP Tsai, T Bourouina, JH Teng, XH Zhang, ... Advanced materials 23 (15), 1792-1796, 2011 | 280 | 2011 |
| Microelectromechanical Maltese-cross metamaterial with tunable terahertz anisotropy WM Zhu, AQ Liu, T Bourouina, DP Tsai, JH Teng, XH Zhang, GQ Lo, ... Nature communications 3 (1), 1274, 2012 | 243 | 2012 |
| Design and simulation of an electrostatic micropump for drug-delivery applications T Bourouina, A Bosseboeuf, JP Grandchamp Journal of Micromechanics and Microengineering 7 (3), 186, 1997 | 207 | 1997 |
| Modeling micropumps with electrical equivalent networks T Bourouina, JP Grandchamp Journal of Micromechanics and Microengineering 6 (4), 398, 1996 | 170 | 1996 |
| Electrostatic vibration energy harvester with combined effect of electrical nonlinearities and mechanical impact P Basset, D Galayko, F Cottone, R Guillemet, E Blokhina, F Marty, ... Journal of Micromechanics and Microengineering 24 (3), 035001, 2014 | 157 | 2014 |
| Nuclear deformation during breast cancer cell transmigration Y Fu, LK Chin, T Bourouina, AQ Liu, AMJ VanDongen Lab on a chip 12 (19), 3774-3778, 2012 | 124 | 2012 |
| MOEMS: Micro-opto-electro-mechanical Systems ME Motamedi SPIE press, 2005 | 121 | 2005 |
| Water‐resonator‐based metasurface: an ultrabroadband and near‐unity absorption Q Song, W Zhang, PC Wu, W Zhu, ZX Shen, PHJ Chong, QX Liang, ... Advanced Optical Materials 5 (8), 1601103, 2017 | 103 | 2017 |
| Permalloy electroplating through photoresist molds JM Quemper, S Nicolas, JP Gilles, JP Grandchamp, A Bosseboeuf, ... Sensors and Actuators A: Physical 74 (1-3), 1-4, 1999 | 99 | 1999 |
| The MEMSNAS process: microloading effect for micromachining 3-D structures of nearly all shapes T Bourouina, T Masuzawa, H Fujita Journal of Microelectromechanical Systems 13 (2), 190-199, 2004 | 95 | 2004 |
| Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon B Saadany, M Malak, M Kubota, F Marty, Y Mita, D Khalil, T Bourouina IEEE journal of selected topics in quantum electronics 12 (6), 1480-1488, 2006 | 90 | 2006 |
| Monolithic silicon‐micromachined free‐space optical interferometers onchip YM Sabry, D Khalil, T Bourouina Laser & Photonics Reviews 9 (1), 1-24, 2015 | 86 | 2015 |
| Zinc oxide nano-enabled microfluidic reactor for water purification and its applicability to volatile organic compounds I Azzouz, YG Habba, M Capochichi-Gnambodoe, F Marty, J Vial, ... Microsystems & Nanoengineering 4 (1), 1-7, 2018 | 83 | 2018 |
| Polarization dependent state to polarization independent state change in THz metamaterials WM Zhu, AQ Liu, W Zhang, JF Tao, T Bourouina, JH Teng, XH Zhang, ... Applied Physics Letters 99 (22), 221102, 2011 | 77 | 2011 |
| Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor B Le Foulgoc, T Bourouina, O Le Traon, A Bosseboeuf, F Marty, ... Journal of micromechanics and microengineering 16 (6), S45, 2006 | 74 | 2006 |
| Deep reactive ion etching of sub-micrometer trenches with ultra high aspect ratio J Parasuraman, A Summanwar, F Marty, P Basset, DE Angelescu, ... Microelectronic engineering 113, 35-39, 2014 | 71 | 2014 |
| On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching KN Nguyen, P Basset, F Marty, Y Leprince-Wang, T Bourouina Journal of Applied Physics 113 (19), 194903, 2013 | 70 | 2013 |
Frederic MARTYUniversité Gustave Eiffel, ESIEE Paris, CNRS, ESYCOM Lab.Verified email at esiee.fr
