| Graphitization of n-type polycrystalline silicon carbide for on-chip supercapacitor application F Liu, A Gutes, I Laboriante, C Carraro, R Maboudian Applied Physics Letters 99 (11), 2011 | 58 | 2011 |
| Growth and characterization of nitrogen-doped polycrystalline 3C-SiC thin films for harsh environment MEMS applications F Liu, C Carraro, AP Pisano, R Maboudian Journal of Micromechanics and Microengineering 20 (3), 035011, 2010 | 51 | 2010 |
| Versatile CMOS-MEMS integrated piezoelectric platform JM Tsai, M Daneman, B Boser, D Horsley, M Rais-Zadeh, HY Tang, Y Lu, ... 2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015 | 46 | 2015 |
| Residual stress characterization of polycrystalline 3C-SiC films on Si (100) deposited from methylsilane F Liu, C Carraro, J Chu, R Maboudian Journal of Applied Physics 106 (1), 2009 | 43 | 2009 |
| Measurement of adhesion forces between polycrystalline silicon surfaces via a MEMS double-clamped beam test structure GH Li, I Laboriante, F Liu, M Shavezipur, B Bush, C Carraro, ... Journal of Micromechanics and Microengineering 20 (9), 095015, 2010 | 29 | 2010 |
| Low frequency response microphone diaphragm structures and methods for producing the same F Liu, KL Yang US Patent 8,946,831, 2015 | 28 | 2015 |
| Enhanced Ohmic contact via graphitization of polycrystalline silicon carbide F Liu, B Hsia, C Carraro, AP Pisano, R Maboudian Applied Physics Letters 97 (26), 2010 | 24 | 2010 |
| Integrated CMOS back cavity acoustic transducer and the method of producing the same F Liu, MJ Daneman, B Kim, A Minervini US Patent 9,299,671, 2016 | 17 | 2016 |
| Ex situ vapor phase boron doping of silicon nanowires using BBr3 GS Doerk, G Lestari, F Liu, C Carraro, R Maboudian Nanoscale 2 (7), 1165-1170, 2010 | 16 | 2010 |
| Interfacial adhesion between rough surfaces of polycrystalline silicon and its implications for M/NEMS technology I Laboriante, B Bush, D Lee, F Liu, TJK Liu, C Carraro, R Maboudian Journal of adhesion science and technology 24 (15-16), 2545-2556, 2010 | 16 | 2010 |
| Microphone system with mechanically-coupled diaphragms F Liu, KL Yang US Patent 9,143,870, 2015 | 15 | 2015 |
| Corrosion mechanism and surface passivation strategies of polycrystalline silicon electrodes F Liu, CS Roper, J Chu, C Carraro, R Maboudian Sensors and Actuators A: Physical 166 (2), 201-206, 2011 | 14 | 2011 |
| Piezoelectric acoustic resonator based sensor F Liu, JML Tsai, X Li, M Daneman US Patent 9,618,405, 2017 | 13 | 2017 |
| Magnetic micromechanical structures based on CoNi electrodeposited alloys P Cojocaru, L Magagnin, E Gomez, E Vallés, F Liu, C Carraro, ... Journal of Micromechanics and Microengineering 20 (12), 125017, 2010 | 11 | 2010 |
| Gas sensing device with chemical and thermal conductivity sensing F Liu, P Hartwell, M Lim, Y Yang US Patent 10,598,621, 2020 | 10 | 2020 |
| Effect of illlumination on thermionic emission from microfabricated silicon carbide structures JH Lee, I Bargatin, J Provine, F Liu, MK Seo, R Maboudian, ... 2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011 | 8 | 2011 |
| Low-energy ion bombardment to tailor the interfacial and mechanical properties of polycrystalline 3C-silicon carbide F Liu, CH Li, AP Pisano, C Carraro, R Maboudian Journal of Vacuum Science & Technology A 28 (5), 1259-1262, 2010 | 8 | 2010 |
| In situ studies of interfacial contact evolution via a two-axis deflecting cantilever microinstrument F Liu, I Laboriante, B Bush, CS Roper, C Carraro, R Maboudian Applied Physics Letters 95 (13), 2009 | 8 | 2009 |
| Microphone with parasitic capacitance cancelation F Liu, KL Yang US Patent 8,755,541, 2014 | 7 | 2014 |
| Morphological, electrical, and chemical changes in cyclically contacting polycrystalline silicon surfaces coated with perfluoroalkylsilane self-assembled monolayer I Laboriante, M Fisch, A Payamipour, F Liu, C Carraro, R Maboudian Tribology Letters 44, 13-17, 2011 | 6 | 2011 |
Roya MABOUDIANUniversity of California at BerkeleyEmail confirmado em berkeley.edu
